Axcelis Technologies, Inc. will be a top-level Platinum Sponsor at the International Conference on Ion Implantation Technology 2024 (IIT 2024) taking place September 23-26 at the Toyama International Conference Center in Japan.

IIT 2024 is the 24th Conference in the biennial series focused on the major challenges in current and emerging technologies related to implant/doping and annealing processes, device applications, equipment, metrology and modeling. 

At the event, Axcelis will host a company exhibit and the company’s technologists and collaborators will present on nine topics:

  1. Performance of an Aluminum Sputtering Source for High Current Doping in Power Devices
  2. Energetic and Surface Metals Characterization of Purion XEmax With and Without Boost™ Technology Using Vapor Phase Decomposition-Inductively Coupled Plasma Mass Spectrometry
  3. Radiation Characterization and Mitigation of High Energy H+ Beams
  4. Wear-Resistant Surface Coatings for Long Electrostatic Chuck Life and Stable Performance
  5. Self-contained Predictive System Diagnostic Sensors
  6. Comparison of Arsenic and Antimony Dopant Distribution Profiles of Very High Energy Implantations
  7. New Challenges and Opportunities in Wide Bandgap Materials with Ion Implantation and Annealing Co-Optimization
  8. Dual Cathode Ion Source for Axcelis’ High Energy Implanters
  9. Low Metals Ion Source

President and CEO of Axcelis Technologies Russell Low said, “We’re excited to be a Platinum Sponsor of IIT 2024, one of the most important technology forums in the ion implantation industry.  We’re especially pleased to be participating at the event in Japan this year, which is a very important market for Axcelis.  Axcelis recently opened several new Service Centers in Japan to support our expanding customer base.  We remain focused on growing our global market share by providing customers the most innovative, enabling implant technology and support solutions to ensure their success.”

For more information on the event, or to register, visit the conference website at https://smartconf.jp/content/iit2024.

Original – Axcelis Technologies