-
LATEST NEWS / SiC / WBG3 Min Read
Korea Electrotechnology Research Institute (KERI) succeeded in transferring the ‘Ion Implantation and its Evaluation Technology for the SiC (silicon carbide) Power Semiconductor’ to a Hungarian company.
Power semiconductors are key components in electricity and electronics, acting as the muscles of the human body by regulating the direction of current and controlling power conversion. There are many different materials for power semiconductors. Among them, SiC is receiving the most attention due to its excellent material properties, including high durability and excellent power efficiency. When SiC power semiconductors are incorporated into electric vehicles, they cut down the power consumption of the battery and reduce the body weight and volume of the vehicle, resulting in energy efficiency improvements of up to 10%
While SiC power semiconductors have many advantages, the manufacturing process is also very challenging. Previously, a method was applied to create a device by forming an epi layer (single-crystal semiconductor thin-film) on a highly conductive wafer and flowing current through that area. However, during this process, the surface of the epi layer becomes rough and the speed of electron transfer decreases. The price of the epi wafer itself is also high, which is a major obstacle to mass production.
To solve this problem, KERI used a method of implanting ions into a semi-insulated SiC wafer without an epi layer. Ion implantation, which makes a wafer conductive, is the work that breathes life into a semiconductor.
SiC materials are hard and require very high energy ion implantation followed by high temperature heat treatment to activate the ions, making it a difficult technology to implement. However, KERI has succeeded in securing the relevant technologies based on its 10 years of experience in operating ion implantation equipment dedicated to SiC.
“Ion implantation technology can significantly reduce process costs by increasing current flow in semiconductor devices and replacing expensive epi wafers,” said Dr. Kim, Hyoung Woo, Director, Advanced Semiconductor Research Center, KERI. He continued, “This is a technology that increases the price competitiveness of high-performance SiC power semiconductors and contributes greatly to mass production.”
This technology was recently transferred to ‘SEMILAB ZRT (CEO: Tibor Pavelka)’, a semiconductor metrology equipment company located in Budapest, Hungary. With a 30-year history, SEMILAB has manufacturing plants in Hungary and the United States. SEMILAB owns patents for medium-sized precision measurement equipment and material characterization equipment, and has the world’s leading technology in semiconductor electrical parameter evaluation system.
They predict that through this technology transfer, they will be able to standardize high-quality SiC. SEMILAB plans to use KERI technology to develop specialized equipment to evaluate the ion implantation process of SiC power semiconductor.
Park Su-yong, the president of SEMILAB Korea, said, “Through the development of specialized equipment, we will be able to progress in-line monitoring of implant processes on SiC wafers for immediate, accurate, and low-cost production control of implant systems and in-line monitoring for pre-anneal implant.” He added, “This will be a great foundation for stably securing a high-quality ion implantation mass production process with excellent uniformity and reproducibility.”
KERI is a government-funded research institute under the NST (National Research Council of Science & Technology) of the Ministry of Science and ICT. It has a total of more than 120 intellectual property rights in the field of power semiconductor research. As of the last 10 years, power semiconductor division of KERI has achieved more than KRW 3 billion in technology transfers, the highest level in South Korea.
Original – KERI
-
LATEST NEWS / SiC / WBG5 Min Read
The University of Arkansas celebrated an important milestone with the groundbreaking on a building that Chancellor Charles Robinson suggested might someday rival the U of A’s most iconic structure, Old Main, in significance to the university and the state of Arkansas.
Robinson and other university leaders, including University of Arkansas System President Don Bobbitt and members of the U of A System Board of Trustees, as well as researchers and industry leaders, gathered at the Arkansas Research and Technology Park in South Fayetteville to celebrate construction of the national Multi-User Silicon Carbide Research and Fabrication Facility, or MUSiC.
The new semiconductor research and fabrication facility will produce microelectronic chips made with silicon carbide, a powerful semiconductor that outperforms basic silicon in several critical ways. The facility will enable the federal government – via national laboratories – businesses of all sizes, and other universities to prototype with silicon carbide, a capability that does not presently exist elsewhere in the U.S.
Work at the facility will bridge the gap between traditional university research and the needs of private industry and will accelerate technological advancement by providing a single location where chips can go from developmental research to prototyping, testing and fabrication.
“This fills a gap for our nation, allowing companies, national laboratories and universities around the nation to develop the low-volume prototypes that go from their labs to fab, ultimately scaling up to the high-volume manufacturing…” said Alan Mantooth, Distinguished Professor of electrical engineering and principal investigator for the MUSiC facility. “We fill that gap. And there’s no other place like it in the world. This is the only place that will be able to do that with silicon carbide.”
The 18,660 square-foot facility, located next to the National Center for Reliable Electrical Power Transmission at the research and technology park, will address obstacles to U.S. competitiveness in the development of silicon-carbide electronics used in a wide range of electronic devices, circuits and other consumer applications. The building will feature approximately 8,000 square feet of clean rooms for fabrication and testing.
Education and training within the facility will also accelerate workforce development, helping supply the next generation of engineers and technicians in semiconductor manufacturing, which Mantooth and other leaders have said is critical for bringing semiconductor manufacturing back to the U.S., after it was offshored in the late 1990s and early 2000s.
“This is truly a special day in the life of the University of Arkansas,” said Robinson. “This building, it really doesn’t need to be hyped. It is a very important building, and you just know it, important for our university, important for our state, important for our nation.”
Robinson invoked another groundbreaking, that of Old Main, the university’s oldest and best known structure, which the university celebrated Aug. 17, 1873, almost exactly 150 years ago.
“I took that 150th anniversary of the groundbreaking as a good sign that we are moving in a timely way,” Robinson said, “doing important work in establishing this building.”
Friday’s groundbreaking occurred a day after the university and the Arkansas Department of Commerce hosted the CHIPS AMERICA Summit, an event in which research, industry and governmental leaders discussed semiconductor-related opportunities resulting from the CHIPS (Creating Helpful Incentives to Produce Semiconductors) and Science Act passed by Congress in 2022. The event featured Adrienne Elrod, director of external and government affairs for the U.S. Department of Commerce’s CHIPS Program Office, U.S. Rep. Steve Womack and Arkansas Secretary of Commerce Hugh McDonald.
During the summit, Elrod stated that prior to the coronavirus pandemic, 90% of the world’s leading-edge chips were manufactured at one facility in Taiwan. The federal government prioritized the onshoring of this critical technology as a result of manufacturing and production shortages of essential computer chips during the pandemic.
“If America is going to compete and lead the world over the next century, we must invest in our technology and manufacturing,” Elrod said. “We want to make sure, at the very least, that we have two new large-scale clusters of leading- edge fabs created (in the United States).”
As Mantooth mentioned, the University of Arkansas can contribute to this effort on a fundamental level and is uniquely positioned to take advantage of opportunities offered by the CHIPS and Science Act, which is providing approximately $280 billion in funding to stimulate domestic research and manufacturing of semiconductors.
“The university is leaning forward and has now secured funding for projects important to microelectronics research and development,” Womack said during Thursday’s summit. “The university has positioned itself, as I say often, to be the preeminent university research location for microelectronics. … I am grateful for the bright minds at the University of Arkansas with a proven track record of success who will make this happen.”
Original – University of Arkansas